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MF118800 - SEMI MF1188 - Test Method for Interstitial Oxygen Content of Silicon by Infrared Absorption With Short Baseline Revision:SEMI MF1188-1107 (Reapproved 0718) - Superseded This Standard provides guidance for

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Description

This Standard provides guidance for development and delivery of training supplied without using dedicated training equipment

As the most accurate and reliable moisture analyzers currently available operate primarily in the ppm range

the scanning solution consists of hydrofluoric acid and hydrogen peroxide or nitric acid

These etching procedures are performed to reveal dislocations by formation of etch pits on the surface of the test specimens

It expands the GEM standard requirements and capabilities in the areas of state models (TSSC

MF118800 - SEMI MF1188 - Test Method for Interstitial Oxygen Content of Silicon by Infrared Absorption With Short Baseline Revision:SEMI MF1188-1107 (Reapproved 0718) - Superseded This Standard provides guidance forThis Test Method covers the determination of the interstitial oxygen content of single crystal silicon by measurement of an infrared absorption band at room temperature, using a short baseline drawn between 1040 cm1 and 1160 cm1 to reduce the uncertainties due to perturbations in the IR absorption at the end point regions of longer baselines that arise from effects other than absorption by interstitial oxygen. Use of the short baseline results in

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