C00332 - SEMI C3.32 - Specification for Chlorine (Cl2), 99.996% Quality StdPbc-1015 SEMI C23-0714 (Reapproved 0620)E

Name: C00332 - SEMI C3.32 - Specification for Chlorine (Cl2), 99.996% Quality StdPbc-1015 SEMI C23-0714 (Reapproved 0620)E
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Description

SEMI C23-0714 (Reapproved 0620)E

specifications

This Standard was technically approved by the Liquid Chemicals Global Technical Committee

35-1109E (editorial revision)

1 The purpose of this Standard is to standardize requirements for 4

C00332 - SEMI C3.32 - Specification for Chlorine (Cl2), 99.996% Quality StdPbc-1015 SEMI C23-0714 (Reapproved 0620)EThe purpose of this Document is to provide specification for chlorine (Cl2) that is used in the semiconductor industry. This Document covers requirements for chlorine used in the semiconductor industry. Referenced SEMI Standards None.

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