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5-1104 (technical revision)
• Unit Object Definition
SEMI E92-0302 (technical revision)
variables item
This edition was approved for publication by the global Audits and Reviews Subcommittee on October 17
C00300 - SEMI C3 - Specification for Gases StdTpc-Automated Material Handling Systems 5-1104 (technical revision)This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on February 2, 2017. Available at www. semiviews. org and www. semi. org in March 2017; originally published in 1981; previously published April 2013. Recognizing the importance of impurity content of gases in the manufacture of semiconductors, suppliers responded by introducing
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