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It oxidizes readily and rapidly to release hydrogen chloride
SEMI E87 — Specification for Carrier Management
This Standard is provided specifically to help facilitate supply chain communication between supply channels as well as the communication between manufacturers and consumers
specifications
orgで入手可能となる。初版は1978年発行。前版は2005年11月発行。
D04200 - SEMI D42 - Specification for Ultra Large Size Mask Substrate Case Revision:SEMI D42-0421 - Current It oxidizes readily and rapidlyThis Standard defines the specification for ultra large size substrate case used in flat panel display (FPD) manufacturing process. The specification defined by this Standard is applicable to the case for containing substrate materials used in FPD mask manufacturing process. The objective substrate range for the mask size defined by this Standard is 850 1,200 mm and more. The automatic handling of the mask substrate becomes indispensable, in