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specifically for serial identification of flatted and notched silicon wafers
including different types of factories (e
Originally published 1995
which defines the properties of the epitaxial layer
This Standard will support more effective equipment acquisition (e
E03700 - SEMI E37 - HSMS의 일반적 서비스(HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES) Revision:SEMI E37-0413 - Superseded specifically for serial identification ofGlobal Information & Control Technical Committee , 2012 12 20 Global Audits and Reviews Subcommittee . 1995 2008 7 . 2013 4 www. semi. org . NOTICE : This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. , , . krstandards@semi. org . NOTICE: The designation of SEMI E37 was updated during the 0413