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no materials requirements or microcontamination limits are given
Bulk distribution systems at the facility level that receive from another system and dispense fab wide or to multiple points of use
any special handling required for IPSs and MPCTs is defined
SEMI E174-1116 (first published)
4 The fundamental GEM requirements form the foundation of the GEM Standard
E16200 - SEMI E162 - Mechanical Interface Specification for 450 mm Front-Opening Shipping Box Load Port Revision:SEMI E162-1111 - Superseded no materials requirements or microcontaminationNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Document is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment, where a 450 front opening shipping box (FOSB) can be loaded and unloaded. The intention