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SEMI HB8-0217 (first published)
used for producing Si wafers for solar cells
orgで，そして2007年3月にCD-ROMで入手可能となる。初版は2003年11月に発行された。
SEMI D11 — Specification for Flat Panel Display Glass Substrate Cassettes
SEMI E87-0312 (technical revision)
P02300 - SEMI P23 - プログラム欠陥マスクおよびマスク欠陥検査システムの感度分析ベンチマーク手順についてのガイドライン StdTpc-MEMS SEMI HB8-0217 (first published)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI global Micropatterning Committee200795global Audits and Reviews Subcommittee200710www. semi. org199320002 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been