F07200 - SEMI F72 - Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel Components Revision:SEMI F72-0214 (Reapproved 0221) - Current The use of AFM for

The use of AFM for measuring the roughness of polymer surfaces is outlined in this test method

specifications and validated analytical procedures

However the quality criteria are expected to be determined by the end user based on the user-specific needs

to be published July 2003

A method is defined for taking advantage of recipe variable parameters

F07200 - SEMI F72 - Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel Components Revision:SEMI F72-0214 (Reapproved 0221) - Current The use of AFM forNOTICE: This Document was reapproved with minor editorial changes. The purpose of this Document is to define a test method to characterize the surface composition of passivated 316L stainless steel components being considered for installation into a high purity gas distribution system. This Test Method is intended to be applied to the wetted surfaces of stainless steel tubing, fittings, valves, and other components as a measure of the effectiveness of