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注意： SEMI E123は2003年7月にサブドキュメントSEMIE123
1 This version of the Specification applies to the substrate types: wafers
It should be noted that the following list of criteria was considered when determining the specified analytical method: Reliability
SEMI E132-1104 (technical revision)
1 The purpose of this Specification is to provide a generally applicable object model of semiconductor equipment structure and related elements
E03005 - SEMI E30.5 - Specification for Metrology Specific Equipment Model (MSEM) Revision:SEMI E30.5-0302 (Reapproved 0217) - Superseded 注意： SEMI E123は2003年7月にサブドキュメントSEMIE123This Standard establishes a Specific Equipment Model (SEM) for Metrology equipment (MSEM). The MSEM consists of equipment characteristics and behaviors that are applicable to this class of equipment and are required to be implemented in addition to the SEMI E30 fundamental requirements and additional capabilities. The scope of this Standard is limited to defining the behavior of Metrology equipment as perceived by a SEMI Equipment Communications