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種々の融着継手設計や製造者における比較のために本方法を使用する場合には，ユーザは評価されるべきチューブや融着継手を明確に選択しなければならない。
It applies to substrates whose nominal thickness specification is 1
it is necessary to consider two main situations:
If differences should exist between the English version and a translation in any other language
The specification defined by this Standard is applicable to the case for containing substrate materials used in FPD mask manufacturing process
C00354 - SEMI C3.54 - Gas Purity Guideline for Silane (SiH4) StdPbc-0920 種々の融着継手設計や製造者における比較のために本方法を使用する場合には，ユーザは評価されるべきチューブや融着継手を明確に選択しなければならない。This Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www. semiviews. org and www. semi. org in October 2011; originally published in 1997; previously published September 2006. NOTICE: This Document was balloted and approved for withdrawal in 2011. Silane is a pyrophoric, flammable colorless gas.
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