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both suppliers and their customers may uniformly define product characteristics and quality requirements
3 — Standard Mechanical Interface (SMIF)
• Load port assignment
and may vary with instrumentation
SEMI E168-1114 (complete rewrite)
M02600 - SEMI M26 - ウェーハの運搬に使用される100 mm，125 mm，150 mm，200 mmウェーハシッピングボックスの再利用ガイド Revision:SEMI M26-0304 (Reapproved 1110) - Inactive both suppliers and their customersglobal Silicon Wafer Committee2010827global Audits and Reviews Subcommittee201010 www. semi. org199520043 100 mm125 mm150 mm200 mm 100 mm125 mm150 mm200 mm Referenced SEMI Standards SEMI M31 Mechanical Specification for Front Opening Shipping Box Used to Transport and Ship 300 mm Wafers SEMI M45 Specification for 300 mm Wafer Shipping System
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